The Semi-Conductor industry requires aggressive chemistries and acids to etch and develop silicon components. These aggressive chemistries make it necessary to use materials which are fit for function and that can withstand the working environment.
Carville CNC machines a range of precision machined component parts for use in the semi-conductor manufacturing industry. It is critical to the wafer manufacturing process that components such as thrust plates are produced to strict tolerances with regards both machined dimensions and surface flatness.
Silicon wafers are produced at sizes from 200mm to 300mm. The silicon is flat and must be handled with care throughout the manufacturing process. Carville manufacture a series of wafer carriers in PEEK and these are enhanced with addition of polymer seals. The polymer seal is used to support the wafer during the process.
As silicon wafers are processed through the manufacturing operations, it is necessary for these parts to transfer between environments. Some areas will have dangerous chemicals or gases and it is necessary to seal these areas with gates.
Carville produce aluminium gates which are enhanced with a polymer seal. These aluminium gates are opened to allow material transfer and then closed forming a secure environmental seal.
The nature of the aggressive chemicals used in the semi-conductor industry requires that components are produced in materials such as PEEK and Aluminium.